Edwards Limited, a leading global supplier of vacuum and abatement equipment and services, has introduced the STP-iXR1606 series of magnetically-levitated turbo-molecular pumps (TMP) with a fully-integrated onboard controller. Edwards’ new TMP incorporates a revolutionary new rotary design that delivers approximately 40 percent improvement in throughput at high gas flow rates and an increase of nearly 90 percent in maximum gas flow, compared to existing products.
Edwards’ new pump features a fully-integrated controller that eliminates the connection cable and rack conventionally required with a non-integrated controller. This helps reduce footprint, saving valuable fab real estate, as well as installation time and cost. In addition, the onboard controller incorporates a small power supply, which compared to existing products, delivers approximately 32 percent reduction in energy consumption at high gas flows.
“Our new STP-iXR1606 extends the already high performance of our industry-leading turbo-molecular pumps,” said Masahide Tanaka, STP product manager, Edwards. “It matches the peak pumping speed of our highest performing pump in the 8-inch TMP class, but with significant improvements in throughput performance and maximum allowable gas flow. As with all of our magnetically-levitated TMPs, it requires no maintenance. The STP-iXR1606 series provides our customers with an all-in-one TMP solution for all their applications, with reduced footprint, simplified installation and reduced energy costs.”
The STP-iXR1606 series delivers high reliability in dirty environments with equivalent IP54 protection against dust and humidity. It has I/O remote, RS232C, RS485 and STP-link standard communication ports, with Profibus and DeviceNet available as options.
