The three companies within the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions – are showcasing their solutions together from November 12 to 15, 2024 at the Semicon Europa 2024 trade show in Munich.
Visitors to Semicon Europa can look forward to innovative vacuum technology and gas abatement systems used in semiconductor fabs and at OEMs. They can talk to experts from Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions about vacuum pumps, leak detectors, gas abatement systems and valves at Booth 555 in Hall C1.
Vacuum pumps
The HiPace 3400 IT turbomolecular vacuum pump from Pfeiffer Vacuum has been specially developed for challenging applications in ion implantation and sets the standard as the most compact turbopump in its class. The DN 320 flange size increases the pumping speed for process gases by 30 percent. Its unique bearing concept and coated rotor construction protect both the process and the vacuum pump, providing longevity and reliability.
The oil-free TORRI BD 0100 / 0600 pumps from Busch Vacuum Solutions offer short pump-down times for load lock chambers. They are some of the smallest, lightest and most energy-efficient oil-free multi-stage rotary lobe vacuum pumps on the market.
Thermal gas abatement system
Technology from centrotherm clean solutions combines the benefits of combustion with the concept of electrically heated exhaust gas treatment. This leads to lower operating costs and reduced secondary emissions. For example, the CT-TW-H system can destroy the molecular process gas NF3 with high separation efficiency and extremely low NOx emissions. This provides a sustainable solution with a minimal CO₂ footprint for CVD and metal etching processes.
Sami Busch, Co-Owner and Co-CEO of the Busch Group, explains: “The Busch Group offers a unique portfolio for complete solutions in the semiconductor industry. Our extensive product range can be used in applications from cleanrooms to sub fabs. It covers gas abatement systems, vacuum pumps, contamination management, leak detection, valves, sub-fab management and service for all brands.” The group of companies covers the entire range of services from development to manufacturing and service – all from a single source. A further benefit of the Busch Group is its extensive worldwide service network, which offers customers fast and efficient support.
About the Busch Group
The Busch Group is one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the Busch Group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions.
The extensive product and service portfolio includes solutions for vacuum, overpressure and abatement applications in all industries, such as food, semiconductors, analytics, chemicals and plastics. This also includes the design and construction of tailor-made vacuum systems and a worldwide service network.
The Busch Group is a family business that is managed by the Busch family. More than 8,000 employees in 44 countries worldwide work for the group. Busch is headquartered in Maulburg, Baden-Württemberg, in the tri-country region of Germany, France and Switzerland.
The Busch Group manufactures in its 19 own production plants in China, the Czech Republic, France, Germany, India, Romania, South Korea, Switzerland, the United Kingdom, the USA and Vietnam.
The Busch Group has an annual consolidated revenue of close to 2 billion Euro.
Media Contact Details
Sabine Neubrand
Public Relations Manager
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar, Germany
+49 (0)6441 802 – 1223
