ALMERE, The Netherlands – January 22, 2015 – Levitech BV, a leading supplier of advanced process equipment for the manufacturing of solar cells, announced today that it has sold two Levitrack Atomic Layer Deposition (ALD) systems to Japan, the first multiple system order for ALD equipment in the world. A major multinational, which includes solar cell manufacturing among its many concerns, will use the Levitracks for high-volume production and the development of next-generation, high-efficiency crystalline solar cells.
“The further success of the Levitrack, with two being sold to a prestigious client, is confirmation that our mass production solutions for fast ALD deposition deliver the right product to meet the needs of mass-production manufacturers”, stated Jaap Beijersbergen, CEO of Levitech. “The system will be used for PERC cells – with efficiencies exceeding 20 per cent – as well as multi-crystalline and n-type products.”
Since its introduction in 2010, the Levitrack has consistently demonstrated its advanced passivation capabilities at world-leading manufacturers and institutes in both Europe and Asia.
“We know that aluminum oxide film provides excellent cell passivation and increased cell efficiencies, especially when deposited in uniform and dense layers, a particular feature of the ALD technique. In the Levitrack these qualities are combined with an efficient and effective platform for delivery,” said Beijersbergen.
“This customer chose the Levitrack system based on its significant productivity, cost-of-ownership and process advantages over competitive PECVD and other ALD systems for aluminum oxide (Al2O3) applications.”
About the Levitrack
The Levitrack ALD system is based on the innovative concept of spatial precursor separation, instead of precursor separation in time, and works in combination with the unique floating wafer and conductive heating technology used in the Levitech’s Levitor RTP products. In the Levitrack, substrates float in a linear gas track and are heated to the required process temperature within a matter of seconds. Once heated, the substrates continue to float through a series of ALD deposition cells. Each cell consists of two precursor ‘curtains’, which are separated by a nitrogen purge ‘curtain’. The unique design of the ALD deposition cells allows for single-side ALD growth. As each ALD deposition cell is optimized for a fast linear motion of the substrates, a high throughput and low cost-of-ownership is guaranteed.
About Levitech
Levitech is a global player in production solutions for the IC and photovoltaic industries. A spin-off of ASM International, Levitech was established in 2009 around its core product, the LevitorTM system. This system is based on a revolutionary patented technology and used in the semiconductor industry for Rapid Thermal Processing (RTP). The LevitrackTM ALD system is a state-of-the-art production solution for the solar industry and is based on the innovative concept of precursor separation in space, instead of time, in combination with the unique floating wafer and conductive heating technology used in the Levitor RTP products. For more information, visit Levitech’s web site at www.levitech.nl
