Pfeiffer – a member of the global Busch Group – will be showcasing its innovative technology from November 18 to 21, 2025, at the Semicon Europa 2025 trade show in Munich.
Asslar, October 17, 2025 – Visitors to Semicon Europa can look forward to innovative vacuum technology and gas abatement systems used in semiconductor fabs and at OEMs. They can talk to experts from Pfeiffer Vacuum+Fab Solutions about vacuum pumps, leak detectors, gas abatement systems or valves at Booth 561 in Hall B1. Here, visitors can see the highlights that Pfeiffer will present, including vacuum pumps and gas abatement systems.
Vacuum pumps for harsh semiconductor environments
The UltiDry multi-stage roots vacuum pump combines robustness with low energy requirements. Specially developed for the semiconductor industry, the UltiDry is well suited for highly demanding applications. It has been designed to handle high flow rates, harsh operating conditions, and corrosive gases – all while delivering outstanding powder management and energy efficiency.
Improved air quality with thermal gas abatement
Designed to ensure safe and environmentally friendly semiconductor processes, gas abatement systems from Pfeiffer focus on reducing harmful emissions and improving air quality within fab environments. By employing innovative technologies, these systems efficiently manage and neutralize hazardous gases and vapors generated during semiconductor manufacturing.
Interactive experience with industry experts
For a visual demonstration of where each of the different technologies from Pfeiffer are integrated in semiconductor manufacturing, a particular highlight of the Pfeiffer booth will be on display. An interactive 3D-printed model of a semiconductor fab gives visitors a realistic and tangible representation of the complete fab solutions, from cleanroom to exhaust.
About the Busch Group
The Busch Group is one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses two well-known brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions. The gas abatement systems previously offered by centrotherm clean solutions – a former Busch Group brand – are now part of the Pfeiffer portfolio.
The extensive product and service offer includes solutions for vacuum, overpressure and abatement applications in all industries, such as food, semiconductors, analytics, chemicals and plastics. This also includes the design and construction of tailor-made vacuum systems and a worldwide service network.
The Busch Group is a family business that is managed by the Busch family. More than 8,000 employees in 44 countries worldwide work for the group. Busch is headquartered in Maulburg, Baden-Württemberg, in the tri-country region of Germany, France and Switzerland.
The Busch Group manufactures in its 23 own production plants in China, the Czech Republic, France, Germany, India, Romania, South Korea, Switzerland, the United Kingdom, the USA and Vietnam.
The Busch Group has an annual consolidated revenue of close to 2 billion Euro.
Media Contact Details
Sandra Thirtle-Höck
Head of Internal Communications
Pfeiffer Vacuum+Fab Solutions
Berliner Strasse 43
35614 Asslar, Germany
+49 (0)6441 802 – 1460
sandra.hoeck@pfeiffer-vacuum.com
www.pfeiffer-vacuum.com
www.buschgroup.com